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Focused Electron Beam Induced Deposition of Si-Based Materials From SiOxCy to Stoichiometric SiO2: Chemical Compositions, Chemical-Etch Rates, and Deep Ultraviolet Optical Transmissions

机译：聚焦电子束诱导Si基材料从SiOxcy到化学计量SiO2：化学组合物，化学成率和深紫外光透射

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A. Perentes; P. Hoffmann;
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1. Focused electron beam induced deposition of Si-based materials from SiOxCy to stoichiometric SiO2: Chemical compositions, chemical-etch rates, and deep ultraviolet optical transmissions [J] . Perentes A, Hoffmann P Chemical vapor deposition: CVD . 2007,第4期

机译：聚焦电子束诱导的Si基材料从SiOxCy到化学计量SiO2的沉积：化学成分，化学刻蚀速率和深紫外光透射
2. Nanosynthesis of Tunable Composite Materials by Room-Temperature Pulsed Focused Electron Beam Induced Chemical Vapour Deposition [J] . M. S. Gabureac, L. Bernau, I. Utke Journal of nanoscience and nanotechnology . 2011,第9期

机译：室温脉冲聚焦电子束诱导化学气相沉积法可调谐复合材料的纳米合成
3. Low energy electron-induced decomposition of (eta(5)-Cp)Fe(CO)(2)Mn(CO)(5), a potential bimetallic precursor for focused electron beam induced deposition of alloy structures [J] . Thorman Rachel M., Unlu Ilyas, Johnson Kelsea, Physical chemistry chemical physics: PCCP . 2018,第8期

机译：低能量电子诱导的（ETA（5）-CP）Fe（CO）（2）Mn（Co）（Co）（5）的分解，聚焦电子束诱导合金结构的潜在双金属前体
4. FOCUSED ION BEAM INDUCED CHEMICAL VAPOR DEPOSITION (FIB-CVD) FOR LOCAL NANODEPOSITION OF DIELECTRIC MATERIAL [C] . Heinz D.Wanzenboeck, Helmut Langfischer, Stefan Harasek, The Meeting of the Electrochemical Society . 2003

机译：聚焦离子束诱导的介电材料局部纳米沉积的化学气相沉积（FIB-CVD）
5. Mechanistic analysis of the thermally induced decomposition of certain metal beta-diketonate precursors for chemical vapor deposition of electronic materials [D] . Obi-Johnson, Bettie Jeanne 1999

机译：电子材料化学气相沉积过程中某些金属β-二酮金属前体的热诱导分解机理分析
6. Combined Focused Electron Beam-Induced Deposition and Etching for the Patterning of Dense Lines without Interconnecting Material [O] . Sangeetha Hari, P. H. F. Trompenaars, J. J. L. Mulders, 2021

机译：结合聚焦的电子束诱导的沉积和蚀刻用于致密线的图案化而不互连材料
7. Transmission Electron Microscopy Specimen Preparation for Two Dimensional Material Using Electron Beam Induced Deposition of a Protective Layer in the Focused Ion Beam Method [O] . Byeong-Seon An, Yeon Ju Shin, Jae-Seon Ju, 2018

机译：透射电子显微镜样品制备二维材料的使用电子束诱导在聚焦离子束法中沉积保护层

Focused Electron Beam Induced Deposition of Si-Based Materials From SiOxCy to Stoichiometric SiO2: Chemical Compositions, Chemical-Etch Rates, and Deep Ultraviolet Optical Transmissions

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