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p-Type Quasi-Mono Silicon Solar Cell Fabricated by Ion Implantation

机译:由离子注入制造的p型准单硅太阳能电池

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摘要

The p-type quasi-mono wafer is a novel type of silicon material that is processed using a seed directional solidification technique. This material is a promising alternative to traditional high-cost Czochralski (CZ) and float-zone (FZ) material. Here, we evaluate the application of an advanced solar cell process featuring a novel method of ion implantation on p-type quasi-mono silicon wafer. The ion implantation process has simplified the normal industrial process flow by eliminating two process steps: the removal of phosphosilicate glass (PSG) and the junction isolation process that is required after the conventional thermal POCl3 diffusion process. Moreover, the good passivation performance of the ion implantation process improves Voc. Our results show that, after metallization and cofiring, an average cell efficiency of 18.55% can be achieved using 156 × 156 mm p-type quasi-mono silicon wafer. Furthermore, the absolute cell efficiency obtained using this method is 0.47% higher than that for the traditional POCl3 diffusion process.
机译:p型准单晶片是一种新颖的硅材料,其使用种子定向凝固技术处理。该材料是传统的高成本Czochralski(CZ)和浮子区(FZ)材料的有希望的替代方案。在这里,我们评估了在p型准单硅晶片上采用一种新颖的离子注入方法的高级太阳能电池过程。离子注入过程通过消除两个工艺步骤简化了正常的工业过程流程:除去磷硅酸盐玻璃(PSG)和传统热POCL3扩散过程之后所需的结隔离过程的除去。此外,离子植入过程的良好钝化性能改善了VOC。我们的研究结果表明,在金属化和COFIRING之后,使用156×156mm p型准硅晶片可以实现18.55%的平均电池效率。此外,使用该方法获得的绝对电池效率比传统POCL3扩散过程高0.47%。

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