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Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors

机译：晶圆级组成的六个自由位移测量系统，由霍尔传感器组成

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Bo Zhao; Weijia Shi; Jiawei Zhang; Ming Zhang; Xue Qi; Jiaxin Li; Feng Li; Jiubin Tan;
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1. Design and Realization of a Three Degrees of Freedom Displacement Measurement System Composed of Hall Sensors Based on Magnetic Field Fitting by an Elliptic Function [J] . Bo Zhao, Jiu-Bin Tan, Lei Wang, Sensors . 2015,第9期

机译：椭圆函数磁场拟合的霍尔传感器三自由度位移测量系统的设计与实现
2. Tracking system with five degrees of freedom using a 2D-array of hall sensors and a permanent magnet [J] . V. Schlageter, P. -A. Besse, R. S. Popovic, Sensors and Actuators, A. Physical . 2001,第1a3期

机译：使用2D霍尔传感器和永磁体阵列的五自由度跟踪系统
3. Design methods for six-degree-of-freedom displacement measurement systems using cooperative targets [J] . Precision Engineering . 2002,第1期

机译：基于合作目标的六自由度位移测量系统设计方法
4. A five degree-of-freedom laser measurement model on wafer stage of scanning lithography [C] . Teng Wei, Liu Yibing Proceedings of the 29th Chinese Control Conference . 2010

机译：扫描光刻晶圆阶段的五自由度激光测量模型
5. Six degree of freedom optical sensor for dynamic measurement of linear axes. [D] . Kroll, Jeremy John. 2003

机译：六自由度光学传感器，用于线性轴的动态测量。
6. Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors [O] . Bo Zhao, Weijia Shi, Jiawei Zhang, 2018

机译：霍尔传感器组成的晶圆平台的六自由度位移测量系统
7. Design and Realization of a Three Degrees of Freedom Displacement Measurement System Composed of Hall Sensors Based on Magnetic Field Fitting by an Elliptic Function [O] . Bo Zhao, Lei Wang, Jiu-Bin Tan 2015

机译：基于椭圆函数磁场拟合的霍尔传感器三自由度位移测量系统的设计与实现

Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors

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