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Design and Fabrication of Air-Based 1-3 Piezoelectric Composite Transducer for Air-Coupled Ultrasonic Applications

机译:用于空气耦合超声波应用的空气基1-3压电复合换能器的设计与制造

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摘要

The air-based 1-3 piezoelectric composite transducers are designed and fabricated in order to solve the acoustic impedance matching problem. Firstly, a finite element model using honeycomb structure as the piezoelectric composite matrix is built to reduce the acoustic impedance of the sensitive element. Three important factors, volume fraction of piezoelectric materials φ, the thickness h, and the size s of the square cross section of piezoelectric column, are examined and verified in simulation. Then, according to the result of simulation, the piezoelectric composites and the air-coupled transducers are fabricated. The honeycomb structures of resin are produced by the method of 3D printing technology, with the volume fraction of air being 30%. The impedance characteristics and the excitation/reception performance of the air-coupled transducers are measured and optimized. Meanwhile, a scanning experiment is carried out to demonstrate the crack detection process in monocrystalline silicon. A0 mode of Lamb waves is excited and collected. The location and size of the defect will be determined by calculating the correlation coefficients of the received signals and reference signals. Finally, a 15 mm × 0.5 mm × 0.5 mm scratch is clearly distinguished.
机译:设计和制造的基于空气的1-3压电复合换能器,以解决声阻抗匹配问题。首先,建立了使用蜂窝结构作为压电复合矩阵的有限元模型,以降低敏感元件的声阻抗。在模拟中检查并验证压电柱的压电材料φ,厚度H和尺寸S的三个重要因素,体积分数。然后,根据模拟的结果,制造压电复合材料和空气耦合换能器。树脂的蜂窝结构是通过3D印刷技术的方法产生的,空气的体积分数为30%。测量和优化空气耦合换能器的阻抗特性和激发/接收性能。同时,进行扫描实验以证明单晶硅中的裂纹检测过程。兴奋和收集羊波的A0模式。缺陷的位置和大小将通过计算接收信号的相关系数和参考信号来确定。最后,清楚地区分,清楚地区出来15毫米×0.5mm×0.5毫米。

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