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Influence of Alumina Addition on the Optical Properties and the Thermal Stability of Titania Thin Films and Inverse Opals Produced by Atomic Layer Deposition

机译：氧化铝添加对二氧化钛薄膜的光学性质和热稳定性的影响及原子层沉积产生的逆蛋白

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Martin Waleczek; Jolien Dendooven; Pavel Dyachenko; Alexander Y. Petrov; Manfred Eich; Robert H. Blick; Christophe Detavernier; Kornelius Nielsch; Kaline P. Furlan; Robert Zierold;
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1. Chemical Stability of Titania and Alumina Thin Films Formed by Atomic Layer Deposition [J] . Correa Gabriela C., Bao Bo, Strandwitz Nicholas C. ACS applied materials & interfaces . 2015,第27期

机译：通过原子层沉积形成的二氧化钛和氧化铝薄膜的化学稳定性
2. Influence of the bilayer thickness on the optical properties of Al2O3-Y2O3 dielectric nanolaminate films grown by thermal atomic layer deposition [J] . Lopez J., Sotelo A., Castillon F. F., Materials Research Bulletin . 2017,第MARa期

机译：双层厚度对热原子层沉积生长的Al2O3-Y2O3介电纳米层压膜光学性能的影响
3. Influence of film thickness and annealing temperature on the structural and optical properties of ZnO thin films on Si (100) substrates grown by atomic layer deposition [J] . Ji-Li Tian, Hua-Yu Zhang, Gui-Gen Wang, Superlattices and microstructures . 2015,第JULa期

机译：膜厚和退火温度对通过原子层沉积法生长的Si（100）衬底上ZnO薄膜的结构和光学性质的影响
4. Investigation of Physical Properties and Thermal Stability of Ultra-Thin TIN/HFO2 Film Stack Prepared by Atomic Layer Deposition [C] . Yiqun Liu, Qingqing Wu, Xiang Lv, China Semiconductor Technology International Conference . 2021

机译：用原子层沉积制备的超薄锡/ HFO2膜叠层物理性质及热稳定性研究
5. Mechanistic Studies of Atomic Layer Deposition and Thermal Atomic Layer Etching Processes of Various Oxide Thin Films [D] . Rahman, Rezwanur. 2018

机译：各种氧化物薄膜原子层沉积和热原子层蚀刻工艺的机械研究
6. Effects of Rapid Thermal Annealing on the Structural Electrical and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition [O] . Jingjin Wu, Yinchao Zhao, Ce Zhou Zhao, 2016

机译：快速热退火对原子层沉积生长Zr掺杂ZnO薄膜的结构电学和光学性质的影响
7. Effects of Rapid Thermal Annealing on the Structural, Electrical, and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition [O] . Wu, J, Zhao, Y, Zhao, C, 2016

机译：快速热退火对原子层沉积生长Zr掺杂ZnO薄膜的结构，电学和光学性质的影响

Influence of Alumina Addition on the Optical Properties and the Thermal Stability of Titania Thin Films and Inverse Opals Produced by Atomic Layer Deposition

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