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Study on the Time-Varying Characteristics of Discharge Plasma in Micro-Electrical Discharge Machining

机译:微电路电加工中放电等离子体时变特性的研究

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摘要

Micro electrical discharge machining (micro-EDM) has been widely applied in the field of precision machining, but the machining mechanism is still unclear. In this paper, the relationship between the characteristics of discharge plasma and discharge duration is clarified by analyzing the formation and expansion process of the discharge plasma channel under micro-scale discharge conditions. Based on the experimental results, the effects of discharge duration on the discharge current, discharge voltage and discharge crater size are discussed. The results show that the expansion acceleration, internal pressure, temperature, and electron density of the discharge plasma decrease as the discharge duration increase, while the radius and expansion velocity of the discharge plasma increase, and finally the discharge plasma reaches the state of shape−position equilibrium. The resistance of discharge plasma is estimated to fluctuate in the range of 38−45 Ω by the ratio of discharge maintenance voltage to discharge current. The energy utilization rate of micro-EDM is very high when discharge duration is less than 4 μs, and then decreases gradually as the discharge duration increased. There is a positive linear relationship between discharge crater volume and discharge duration. The discharge duration has no significant effect on the discharge crater depth. This study provides a theoretical basis for further study of discharge plasma characteristics in micro-EDM.
机译:微电放电加工(微EDM)已广泛应用于精密加工领域,但加工机构尚不清楚。在本文中,通过分析微尺度放电条件下的放电等离子体通道的形成和膨胀过程,阐明了放电等离子体和放电持续时间的特性之间的关系。基于实验结果,讨论了放电持续时间对放电电流,放电电压和放电火山口尺寸的影响。结果表明,随着放电持续时间的增加,放电等离子体的膨胀加速,内部压力,温度和电子密度降低,而放电等离子体的半径和膨胀速度增加,最后放电等离子体达到形状的状态 - 位置均衡。通过放电维护电压与放电电流的比率估计放电等离子体的电阻估计在38-45Ω的范围内。当放电持续时间小于4μs时,微EDM的能量利用率非常高,然后随着放电持续时间的增加,逐渐降低。放电火山口体积和放电持续时间之间存在正线性关系。放电持续时间对放电火山口深度没有显着影响。本研究为进一步研究微EDM中的放电等离子体特征提供了理论依据。

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