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The effect of thickness on the properties of Zr-Hf-N thin films prepared by reactive co-magnetron sputtering

机译：厚度对反应性共磁控溅射制备的Zr-HF-N薄膜性能的影响

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J. Prathumsit; G. Gitgeatpong; W. Phae-ngam; C. Chananonnawathorn; T. Lertvanithphol; M. Horprathum;
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The effect of thickness on the properties of Zr-Hf-N thin films prepared by reactive co-magnetron sputtering

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