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Property Evaluation of Vapor Deposited TiN Film by the Analysis of Elastic Waves. 2nd Report. Film Strength Estimated by AE Source Inversion during Compressive Loading.

机译：弹性波分析蒸汽沉积锡膜的性质评价。第二次报告。通过AE源反转估算膜强度在压缩负载期间估算。

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Singo OGAWA; Hideo CHO; Kazushi YAMANAKA; Mikio TAKEMOTO;
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年度 1997
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机译：弹性波分析蒸汽沉积锡膜的性质评价。（第一个报告，激光表面声波的弹性性能无损评价。）

Property Evaluation of Vapor Deposited TiN Film by the Analysis of Elastic Waves. 2nd Report. Film Strength Estimated by AE Source Inversion during Compressive Loading.

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