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Investigation of Thin Film Deposition on Stainless Steel 304 Substrates Under Different Operating Conditions

机译:不同工作条件下不锈钢304衬底上的薄膜沉积研究

摘要

In recent times, friction and wear in relation to the deposited carbon films on the steel substrates are important issues for industrial applications. In this research study, solid thin films were deposited on the stainless steel 304 (SS 304) substrates under different operating conditions. In the experiments, natural gas (97.14% methane) was used as a precursor gas in a hot filament thermal chemical vapor deposition (CVD) reactor. Deposition rates on SS 304 substrates were investigated under gas flow rates 0.5 – 3.0 l/min, pressure 20 – 50 torr, gap between activation heater and substrate 3.0 – 6.0 mm and deposition duration 30 – 120 minutes. The obtained results show that there are significant effects of these parameters on the deposition rates on SS 304 within the observed range. Friction coefficient of SS 304 sliding against SS 314 was also investigated under normal loads 5 – 10 N and sliding velocities 0.5 – 1.0 m/s before and after deposition. The experimental results reveal that in general, frictional values are lower after deposition than that of before deposition.
机译:近年来,与在钢基材上沉积的碳膜有关的摩擦和磨损对于工业应用而言是重要的问题。在这项研究中,固体薄膜在不同的操作条件下沉积在304不锈钢(SS 304)基板上。在实验中,天然气(97.14%甲烷)被用作热丝热化学气相沉积(CVD)反应器中的前驱气体。在气体流量0.5 – 3.0 l / min,压力20 – 50托,活化加热器和基板之间的间隙3.0 – 6.0 mm和沉积时间30 – 120分钟的条件下,研究了SS 304基板上的沉积速率。获得的结果表明,这些参数在观察范围内对SS 304上的沉积速率有重大影响。在沉积之前和之后,在5-10 N的正常载荷和0.5-1.0 m / s的滑动速度下,还研究了SS 304相对SS 314滑动的摩擦系数。实验结果表明,一般来说,沉积后的摩擦值要比沉积前的低。

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