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Experimental and Numerical Analyses of Change in Shape of Vacuum Chuck Surface due to Centrifugal Force.

机译：离心力引起的真空吸尘器表面变化的实验性和数值分析。

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Kazuhiro YOKOYAMA; Keiji KOBAYASHI; Toshimichi MORIWAKI; Kenji SUZUKI;
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年度 1991
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Experimental and Numerical Analyses of Change in Shape of Vacuum Chuck Surface due to Centrifugal Force.

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