This paper describes MEMS deformable polymer mirror system for adaptive optics application. This system employs a 4 µm thick SU-8 membrane with a stress balanced double side aluminum coating as a mirror element. Underlying Lorentz actuators are used to control the surface topography of the mirror, enabling optical wavefront correction. Compared to electrostatic, piezoelectric, and thermal actuators, the Lorentz actuators offer low voltage drive (<1 V), high deflection, and bi-directional motion. Mirror deflection of up to 45 µm was demonstrated, with lower deflections of 10 µm achieved with actuator heating below 10 °C.
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