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Effect of Retaining Ring Slot Designs, Conditioning Discs and Conditioning Schemes on the Slurry Bow Wave Width during Chemical Mechanical Planarization

机译：保持环形槽设计，调节盘和调节方案对化学机械平面化浆料弓度宽度的影响

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Leticia Vazquez Bengochea; Yasa Sampurno; Calliandra Stuffle; Fransisca Sudargho; Ruochen Han; Ara Philipossian;
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1. Effect of retaining ring slot designs and polishing conditions on slurry flow dynamics at bow wave [J] . X. Liao, Y. Sampurno, Y. Zhuang, Microelectronic Engineering . 2012,第OCTa期

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5. Novel Studies in Silicon Dioxide, Copper and Tungsten Chemical Mechanical Planarization Processes Relating to Pad Conditioning and Micro-Texture, Slurry Nanoparticles, Tribology and Kinetics [D] . McAllister, Jeffrey Connor. 2019

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6. Slurry Injection Schemes on the Extent of Slurry Mixing and Availability during Chemical Mechanical Planarization [O] . Matthew Bahr, Yasa Sampurno, Ruochen Han, 2017

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Effect of Retaining Ring Slot Designs, Conditioning Discs and Conditioning Schemes on the Slurry Bow Wave Width during Chemical Mechanical Planarization

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