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DESIGN, FABRICATION, MODELING AND CHARACTERIZATION OF ELECTROSTATICALLY-ACTUATED SILICON MEMBRANES

机译：静电硅膜的设计，制造，建模和表征

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Brian C Stahl;
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1. Design, Fabrication, and Characterization of Silicon Nitride Particle-Reinforced Silicon Nitride Matrix Composites by Chemical Vapor Infiltration [J] . Yongsheng Liu, Litong Zhang, Laifei Cheng, International journal of applied ceramic technology . 2010,第1期

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2. Pull-in Voltage of Electrostatically-Actuated Microbeams in Terms of Lumped Model Pull-in Voltage Using Novel Design Corrective Coefficients [J] . Ghader Rezazadeh, Mohammad Fathalilou, Morteza Sadeghi Sensing and imaging . 2011,第3a4期

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3. Design and fabrication of ultrathin silicon-nitride membranes for use in UV-visible airgap-based MEMS optical filters [J] . Mohammadamir Ghaderi, Reinoud F. Wolffenbuttel Journal of Physics: Conference Series . 2016,第1期

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4. Modeling, design, fabrication and characterization of first large 2.5D glass interposer as a superior alternative to silicon and organic interposers at 50 micron bump pitch [C] . Sawyer Brett, Lu Hao, Suzuki Yuya, IEEE Electronic Components and Technology Conference . 2014

机译：第一个大型2.5D玻璃中介层的建模，设计，制造和表征，可以以50微米的凸点间距替代硅和有机中介层
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6. Design fabrication and optical characterization of one-dimensional photonic crystals based on porous silicon assisted by in-situ photoacoustics [O] . Cristian Felipe Ramirez-Gutierrez, Harol David Martinez-Hernandez, Ivan Alonso Lujan-Cabrera, -1

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DESIGN, FABRICATION, MODELING AND CHARACTERIZATION OF ELECTROSTATICALLY-ACTUATED SILICON MEMBRANES

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