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Tungsten Diselenide Patterning and Nanoribbon Formation by Gas‐Assisted Focused‐Helium‐Ion‐Beam‐Induced Etching

机译：通过气体辅助聚焦 - 氦离子光束诱导的蚀刻钨丁二酮蛋白化图案化和纳米波纹

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Michael G. Stanford; Pushpa R. Pudasaini; Nicholas Cross; Kyle Mahady; Anna N. Hoffman; David G. Mandrus; Gerd Duscher; Matthew F. Chisholm; Philip D. Rack;
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1. Optical Output Power Enhancement of Gallium Nitride Light-Emitting Diodes with Microlens Array on p-GaN Layer and Wave-Patterned Sidewalls by Gas-Assisted Focused Ion Beam Etching [J] . Ming-Kwei Lee, Kwei-Kuan Kuo Japanese journal of applied physics . 2008,第4issue1期

机译：气体辅助聚焦离子束刻蚀增强p-GaN层和波状侧壁上具有微透镜阵列的氮化镓发光二极管的光输出功率
2. Enhanced Etching, Surface Damage Recovery, and Submicron Patterning of Hybrid Perovskites using a Chemically Gas-Assisted Focused-Ion Beam for Subwavelength Grating Photonic Applications [J] . Alias Mohd S., Yang Yang, Ng Tien K., Journal of physical chemistry letters . 2016,第1期

机译：使用化学气体辅助聚焦离子束的亚波长光栅光子应用增强了钙钛矿杂化钙钛矿的蚀刻，表面损伤恢复和亚微米图案化
3. Laser-Assisted Focused He+ Ion Beam Induced Etching with and without XeF2 Gas Assist [J] . Stanford Michael G., Mahady Kyle, Lewis Brett B., ACS applied materials & interfaces . 2016,第42期

机译：有和没有XeF2气体辅助的激光辅助聚焦He +离子束诱导刻蚀
4. Chemically assisted focused-ion-beam etching for tungsten x-ray mask repair [C] . Lloyd R. Harriott, ATT Bell Labs., Murray Hill, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III . 1993

机译：化学辅助聚焦离子束蚀刻用于钨X射线掩模修复
5. Optical channel waveguide formation by focused ion beam induced selective mixing and wet chemical etching: Design, fabrication and characterization. [D] . Kumar, Mukesh. 1997

机译：通过聚焦离子束诱导的选择性混合和湿法化学蚀刻形成光通道波导：设计，制造和表征。
6. Combined Focused Electron Beam-Induced Deposition and Etching for the Patterning of Dense Lines without Interconnecting Material [O] . Sangeetha Hari, P. H. F. Trompenaars, J. J. L. Mulders, 2021

机译：结合聚焦的电子束诱导的沉积和蚀刻用于致密线的图案化而不互连材料
7. Enhanced Etching, Surface Damage Recovery, and Submicron Patterning of Hybrid Perovskites using a Chemically Gas-Assisted Focused-Ion Beam for Subwavelength Grating Photonic Applications [O] . Alias Mohd Sharizal, Yang Yang, Ng Tien Khee, 2015

机译：使用化学气体辅助聚焦离子束的亚波长光栅光子应用增强了钙钛矿杂化钙钛矿的蚀刻，表面损伤恢复和亚微米图案化

Tungsten Diselenide Patterning and Nanoribbon Formation by Gas‐Assisted Focused‐Helium‐Ion‐Beam‐Induced Etching

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