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>Ultra-High-Q Silica-on-Silicon Ridge-Ring-Resonator with an Integrated Silicon Nitride Waveguide
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Ultra-High-Q Silica-on-Silicon Ridge-Ring-Resonator with an Integrated Silicon Nitride Waveguide
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机译:具有集成氮化硅波导的超高Q硅硅脊环谐振器
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摘要
A microcavity resonator having a Q factor exceeding 100 million and featuring a monolithic silicon nitride waveguide is demonstrated. This device enables full integration ofudultra-high-Q resonators with other photonic components.
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