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Fabrication of Ceramic Thin Film Type Pressure Sensors for High-Temperature Applications and Their Characteristics

机译：用于高温应用的陶瓷薄膜式压力传感器的制造及其特性

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2. Effect of gas type, pressure and temperature on the electrical characteristics of Al-doped SnO_2 thin films deposited by RGTO method for gas sensor application [J] . Ammar A.H., Abo-Ghazala M.S., Farag A.A.M., Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2013,第Null期

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3. Thermoelectric Characteristics of n-Type Bi_2Te_3 and p-Type Sb_2Te_3 Thin Films Prepared by Co-Evaporation and Annealing for Thermopile Sensor Applications [J] . Jae-Hwan Kim, Jung-Yeol Choi, Jae-Man Bae Materials transactions . 2013,第4期

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4. Fabrication of micromachined ceramic thin-film type pressure sensors for overpressure tolerance and its characteristics [C] . G. S. Chung, J. M. Kim Device and Process Technologies for MEMS, Microelectronics, and Photonics III . 2003

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5. Growth and surface characteristics of oxide thin films for chemical sensor applications. [D] . Burgess, Darren R. 1999

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6. Comparison of Two Types of Overoxidized PEDOT Films and Their Application in Sensor Fabrication [O] . Yun Hui, Chao Bian, Jinfen Wang, 2017

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8. Thin Film Ceramic Strain Sensor Development for Harsh Environments: Interim Report on Identification of Candidate Thin Film Ceramics to Test for Viability for Static Strain Sensor Development [R] . Wrbanek, John D., Fralick, Gustave C., Hunter, Gary W. 2006

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Fabrication of Ceramic Thin Film Type Pressure Sensors for High-Temperature Applications and Their Characteristics

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