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Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer

机译：单一（111）-Silicon晶片中单整体集成的三轴高冲击仪的整体集成三轴高冲击仪的设计，制造和测试

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Shengran Cai; Wei Li; Hongshuo Zou; Haifei Bao; Kun Zhang; Jiachou Wang; Zhaohui Song; Xinxin Li;
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1. A High-Performance Dual-Cantilever High-Shock Accelerometer Single-Sided Micromachined in (111) Silicon Wafers [J] . Wang J., Li X. Microelectromechanical Systems, Journal of . 2010,第6期

机译：（111）硅晶片中的高性能双悬臂高冲击加速度计单面微加工。
2. Sensitivity optimization of a monolithic high-shock three-axis piezoresistive accelerometer with single sensing element [J] . SONG Ping, LI QingZhou, LI KeJie 中国科学通报：英文版 . 2009,第019期

机译：具有单个传感元件的整体式高冲击三轴压阻加速度计的灵敏度优化
3. Monolithically integrated tri-axis shock accelerometers with MHz-level high resonant-frequency [J] . Zou Hongshuo, Wang Jiachou, Chen Fang, Journal of Micromechanics and Microengineering . 2017,第7期

机译：具有MHz级高谐振频率的单片集成的三轴冲击加速度计
4. Monolithic tri-axis cantilever high-shock accelerometers fabricated with a single-sided process in (111) wafers [C] . Hongshuo Zou, Jiachou Wang, Fang Chen, International Conference on Solid-State Sensors, Actuators and Microsystems . 2017

机译：在（111）晶片中采用单面工艺制造的单片三轴悬臂式高冲击加速度计
5. Design, fabrication and testing of conformal, localized wafer-level packaging for RF MEMS devices. [D] . Collins, Gustina B. 2006

机译：设计，制造和测试用于RF MEMS器件的保形，局部晶圆级封装。
6. Design Fabrication and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer [O] . Shengran Cai, Wei Li, Hongshuo Zou, 2019

机译：单晶硅晶片中单片集成三轴高冲击加速度计的设计制造和测试
7. Test set-ups for fast measurement of monolithic integrated circuits from on-wafer to system. application to a novel GaAs monolithic transimpedance amplifier for high speed optical communication systems [O] . Dorta P., Salazar-Palma M., Casao J.A., 1992

机译：测试设置，用于快速测量从晶圆上到系统的单片集成电路。在新型GaAs单片互阻放大器中的应用
8. Silicon Wafer Cleaning for Integrated Circuit Fabrication [R] . Hardeman, R. W., Hodge, A. M. 1985

机译：用于集成电路制造的硅晶片清洗

Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer

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