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Modeling Macro-Sized, High Aspect Ratio Through-Hole Filling by Multi-Component Additive-Assisted Copper Electrodeposition

机译:通过多组分添加剂辅助铜电沉积对大型高纵横比通孔填充进行建模

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摘要

A multi-element, time-dependent model is used to examine additive-assisted copper electroplating in macro-channels. This model is an adaptation of the work of Akolkar and Landau [J. Electrochem. Soc., 156, D351 (2009)], used to describe plating in micro-vias for integrated circuits. Using their method for describing species movement in the channel, the model has been expanded to include transport and adsorption limitations of the inhibitor and accelerator, as well as the copper ions in solution. The model is used to investigate copper plating as an infiltration method across many size scales and aspect ratios. Biomorphic graphite scaffolds produced from wood are used as a representative system and the results of a two-additive bath are used to characterize the behavior of the additives and determine the effectiveness of the plating. The results indicate that at macro-scales, channel dimensions play an increasingly important role in dictating the behavior of additive-assisted plating. Because additive systems are designed to establish differential surface coverage within the channel, the success of which is determined by the additive's rates of diffusion and adsorption, certain size scale/aspect ratio combinations preclude such coverage. A guide for sample geometries that may be successfully infiltrated with a two-additive bath is provided.
机译:使用多元素的时间相关模型来检查宏通道中添加剂辅助的铜电镀。该模型是Akolkar和Landau [J.电化学。 Soc。,156,D351(2009)],用于描述集成电路微孔中的电镀。使用他们描述通道中物种移动的方法,该模型已扩展为包括抑制剂和促进剂以及溶液中的铜离子的运输和吸附限制。该模型用于研究铜镀层作为多种尺寸和纵横比的渗透方法。由木材制成的生物形态石墨支架被用作代表系统,并且两次添加浴的结果被用来表征添加剂的行为并确定镀层的有效性。结果表明,在宏观尺度上,通道尺寸在决定添加剂辅助镀层行为方面起着越来越重要的作用。因为添加剂系统被设计为在通道内建立不同的表面覆盖,其成功与否取决于添加剂的扩散和吸附速率,所以某些尺寸比例/长宽比的组合会阻止此类覆盖。提供了可通过两添加剂浴成功渗透的样品几何形状的指南。

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