Design and analysis of a novel dual-mass MEMS resonant output gyroscope

摘要

This paper presents the design and analysis of a novel dual-mass microelectromechanical systems (MEMS) resonant output gyroscope (ROG), which can effectively eliminate the influence of common-mode disturbance, such as the linear acceleration, on the gyroscope working mode by the design of dual-mass form, as well as on the frequency outputs of the double-ended tuning fork (DETF) resonators by the differential arrangement. The concept of the ROG is introduced first. Then the dynamics of the gyroscope and the force-frequency characteristics of the DETF resonator are theoretically analyzed. By establishing the distribution coefficient of force and the reasonable equivalent of the force-frequency characteristics of the DETF resonator, the accurate expression of the device sensitivity is obtained. Based on the analysis results, the leverage mechanism and the DETF resonator are designed in detail. Then the configuration of the gyroscope, a dual-mass structure, is given. Finally, the validity of the analysis and design are verified by numerical simulations.