Low Energy X-Ray Spectra Measured with a Mercuric Iodide Energy Dispersive Spectrometer in a Scanning Electron Microscope

摘要

A mercuric iodide energy dispersive x-rayudspectrometer, with Peltier cooling provided for theuddetector and input field effect transistor, has beenuddeveloped and tested in a scanning electron microscope.udX-ray spectra were obtained with the 15 keV electronudbeam. An energy resolution of 225 eV (FWHM) for Mn-Kαudat 5.9 keV and 195 eV (FWHM) for Mg-K line at 1.25 keVudhas been measured. Overall system noise level was 175udeV (FWHM). The detector system characterization with audcarbon target demonstrated good energy sensitivity atudlow energies and lack of significant spectral artifactsudat higher energies.