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Simulation of Conductance Effects on Vacuum Characteristics of High Vacuum System for Semiconductor Processing

机译：用于半导体加工高真空系统真空特性的电导效应模拟

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Hyung-Taek Kim; Man-Jae Seo;
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年度 2010
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1. Understanding process vacuum condensers - Process vacuum condensers are an integral part of a vacuum system [J] . Chemical Processing . 2001,第5期

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2. Particle Behavior in Vacuum Systems: Implications for In-Situ Particle Monitoring in Semiconductor Processing Equipment [J] . Patrick D. Kinney, Gwi-Nam Bae, David Y.H. Pui, Journal of the IES . 1996,第6期

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3. Prediction of MOF Performance in Vacuum Swing Adsorption Systems for Postcombustion CO_2 Capture Based on Integrated Molecular Simulations, Process Optimizations, and Machine Learning Models [J] . Thomas D. Burns, Kasturi Nagesh Pai, Sai Gokul Subraveti, Environmental Science & Technology . 2020,第7期

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4. Enhancing Performance in Thin Tilm Transistors with Vacuum or Solution Processed Amorphous Oxide Semiconductors Towards Display Applications [C] . Changdong Chen, Gongtan Li, MinMin Li, IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale . 2018

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5. Charging and vacuum -ultraviolet radiation effects on plasma processing induced damage of semiconductor devices [D] . Cismaru, Cristian 1999

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6. Vacuum level effects on gait characteristics for unilateral transtibial amputees with elevated vacuum suspension [O] . Hang Xu, Kasey Greenland, Donald Bloswick, -1

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7. Safety analysis in large volume vacuum systems like tokamak: Experiments and numerical simulation to analyze vacuum ruptures consequences [O] . Malizia A, Lupelli I, Richetta M, 2014

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Simulation of Conductance Effects on Vacuum Characteristics of High Vacuum System for Semiconductor Processing

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