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Measurement of Intrinsic Hardness of Deposited Chromium Thin Films by Nanoindentation Method and Influencing Factors

机译：纳米狭窄法测量沉积铬薄膜的固有硬度及影响因素

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Young-Joon Kang; Ju-Hwan Baeg; Hyun Park; Young-Rae Cho;
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年度 2020
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1. Measurement of Intrinsic Hardness of Deposited Chromium Thin Films by Nanoindentation Method and Influencing Factors [J] . Young-Joon Kang, Ju-Hwan Baeg, Hyun Park Journal of Korean Institute of Metal and Materials . 2020,第3期

机译：纳米狭窄法测量沉积铬薄膜的固有硬度及影响因素
2. An international round-robin experiment to evaluate the consistency of nanoindentation hardness measurements of thin films [J] . Lee KW., Chung YW., Chan CY., Surface & Coatings Technology . 2003,第1期

机译：国际轮循实验，评估薄膜纳米压痕硬度测量的一致性
3. A method for making substrate-independent hardness measurements of soft metallic films on hard substrates by nanoindentation [J] . Ting Y. Tsui, C.A. Ross, G.M. Pharr Journal of Materials Research . 2003,第6期

机译：通过纳米压痕法对硬质基底上的软金属膜进行基底无关硬度测量的方法
4. A Method to Extract the Intrinsic Mechanical Properties of Soft Metallic Thin Films Based on Nanoindentation Continuous Stiffness Measurement Technique [C] . X Y Zhou, Z D Jiang, H R Wang, 4th international symposium on instrumentation science and technology . 2006

机译：基于纳米压痕连续刚度测量技术的软金属薄膜固有力学性能提取方法
5. Mechanical Characterization of Thin Film Oligomeric Silsesquioxane Polymer Coated on Silicon Substrate with Nanoindentation Measurements [D] . Kareem, Muthanna K. 2018

机译：纳米压痕法测量硅基薄膜低聚倍半硅氧烷聚合物的力学性能
6. Structure Zone Investigation of Multiple Principle Element Alloy Thin Films as Optimization for Nanoindentation Measurements [O] . Alan Savan, Timo Allermann, Xiao Wang, 2020

机译：多元素合金薄膜的结构区研究作为纳米压痕测量的优化
7. Investigations on the influence of process parameters on the structural evolution of ion beam sputter deposited chromium thin films [O] . Balu R, Raju AR, Lakshminarayanan V, 2005

机译：工艺参数对离子束溅射镀铬薄膜结构演变影响的研究

Measurement of Intrinsic Hardness of Deposited Chromium Thin Films by Nanoindentation Method and Influencing Factors

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