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Effect of a Metal Thin Film's Residual Stress and Manufacturing Process on Thin Film Micro-Crack

机译：金属薄膜残余应力和制造过程对薄膜微裂纹的影响

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Byung-Kyu Cho; Seung-Chan Hong; Byung-Sam Kim; Jae-Kyung Cheon;
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1. Effect of a Metal Thin Film's Residual Stress and Manufacturing Process on Thin Film Micro-Crack [J] . Byung-Kyu Cho, Seung-Chan Hong, Byung-Sam Kim Journal of Korean Institute of Metal and Materials . 2020,第3期

机译：金属薄膜残余应力和制造过程对薄膜微裂纹的影响
2. The residual stress-induced buckling of annular thin plates and its application in residual stress measurement of thin films [J] . Qiao DY, Yuan WZ, Yu YT, Sensors and Actuators, A. Physical . 2008,第2期

机译：残余应力引起的环形薄板屈曲及其在薄膜残余应力测量中的应用
3. Effect of adjacent hydrophilic polymer thin films on physical aging and residual stress in thin films of poly(butylnorbornene-ran-hydroxyhexafluoroisopropyl norbornene) [J] . Lewis Elizabeth A., Stafford Christopher M., Vogt Bryan D. Journal of Polymer Science, Part B. Polymer Physics . 2019,第15期

机译：邻近亲水聚合物薄膜对聚（丁基硼植物 - 羟基氟异丙丙基降冰片烯薄膜物理老化及残余应力的影响
4. MULTI-SCALE MEASUREMENT OF THE CHANGE OF THE RESIDUAL STRESS IN A SILICON CHIP DURING MANUFACTURING FROM THIN-FILM PROCESSING TO PACKAGING [C] . Hiroki Kishi, Takuya Sasaki, Nobuki Ueta, International Microsystems, Packaging, Assembly and Circuits Technology Conference . 2009

机译：从薄膜处理到包装的薄膜处理过程中硅芯片残余应力变化的多尺度测量
5. Solution-processed Post Transition Metal Oxide Semiconductor Electronics: High Performance Thin-film Transistor and/or Low Temperature Processed Thin Film [D] . Kim, Myung-Gil 2012

机译：固溶处理后过渡金属氧化物半导体电子产品：高性能薄膜晶体管和/或低温处理薄膜
6. Wearable 1 V operating thin-film transistors with solution-processed metal-oxide semiconductor and dielectric films fabricated by deep ultra-violet photo annealing at low temperature [O] . Byoung-Soo Yu, Jun-Young Jeon, Byeong-Cheol Kang, -1

机译：具有固溶处理的金属氧化物半导体和介电膜的可穿戴式1 V工作薄膜晶体管通过低温深紫外光退火在低温下制成
7. Effect of adjacent hydrophilic polymer thin films on physical aging and residual stress in thin films of poly(butylnorbornene‐ ran ‐hydroxyhexafluoroisopropyl norbornene) [O] . Elizabeth A. Lewis, Christopher M. Stafford, Bryan D. Vogt 2019

机译：邻近亲水性聚合物薄膜对聚（丁基冰刀 - 羟基氟异丙基丙烯烯薄膜物理衰老及残留应力的影响
8. Resistivity, adhesive strength, and residual stress measurements of thin film metallizations on single crystal quartz. [R] . Vianco, P. T., Conley, W. R., Panitz, J. K. G. 1990

机译：单晶石英上薄膜金属化的电阻率，粘接强度和残余应力测量。

Effect of a Metal Thin Film's Residual Stress and Manufacturing Process on Thin Film Micro-Crack

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