Microdischarges in xenon have been generated in a pressure range of 400–1013 mbar with a fixed flow rate of 100 sccm. These microdischarges are obtained from three metallic capillary tubes in series for excimer emission. Total discharge voltage is thrice as large as that of a single capillary discharge tube at current levels of up to 12 mA. Total spectral irradiance of vacuum ultraviolet (VUV) emission also increases significantly compared to that of the single capillary discharge. Further, the irradiance of the VUV emission is strongly dependent on pressure as well as the discharge current.ud
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