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Polymer sphere lithography for solid oxide fuel cells: a route to functional, well-defined electrode structures

机译:固体氧化物燃料电池的聚合物球体光刻技术:通往功能明确的电极结构的途径

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摘要

As a first step towards mechanistic studies of fuel cell electrodes with both well-defined and functionally representative structural features, two-dimensional anti-dot metal films with tunable features are prepared. The fabrication employs a facile, sacrificial templating method, known as polymer sphere lithography, and the resulting metal films are fully connected, yet fully porous. Using initial bead sizes in the range of 500 nm to 3.2 m and oxygen plasma etching to remove from ¼ to ¾ of the original bead diameter, computed triple phase boundary densities in the porous films of 2,000 to 43,500 cm cm-2 are achieved. Image analysis shows the computed (theoretical) and experimental structural features to be in good agreement, demonstrating sufficient perfection in the films for electrochemical studies. Furthermore, thermal stability under hydrogen of thermally evaporated Ni films is excellent, with negligible change in triple phase boundary length as required for quantitative electrochemical measurements. Ultimately, these two-dimensional metallic networks may also serve as the platform for future fabrication of three-dimensional electrodes with truly optimized structural features.
机译:作为对具有明确定义的和功能上具有代表性的结构特征的燃料电池电极进行机理研究的第一步,准备了具有可调特征的二维防点金属膜。该制造过程采用一种称为聚合物球体光刻的简便,牺牲性的模板化方法,所得金属膜完全连接,但完全多孔。使用在500 nm至3.2 m范围内的初始焊珠尺寸和氧等离子体蚀刻以去除原始焊珠直径的1/4至¾,可以在2,000至43,500 cm cm-2的多孔膜中获得计算出的三相边界密度。图像分析表明,所计算的(理论上的)和实验的结构特征非常吻合,证明了用于电化学研究的薄膜具有足够的完善性。此外,热蒸发的镍膜在氢下的热稳定性极好,如定量电化学测量所需的三相边界长度变化可忽略不计。最终,这些二维金属网络还可以用作将来制造具有真正优化结构特征的三维电极的平台。

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