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Wafer bonding and layer transfer processes for 4-junction high efficiency solar cells

机译:四结高效太阳能电池的晶圆键合和层转移工艺

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摘要

A four-junction cell design consisting of InGaAs, InGeAsP, GaAs, and Ga0.5In0.5P subcells could reach 1 x AMO efficiencies of 35.4%. but relies on the integration of non-lattice-matched materials. Wafer bonding and layer transfer processes show promise in the fabrication of InP/Si epitaxial templates for growth of the bottom InGaAs and InGaAsP subcells on a Si support substrate. Subsequent wafer bonding and layer transfer of a thin Ge layer onto the lower subcell stack can serve as an epitaxial template for GaAs and Ga0.5In0.5P subcelis. Present results indicate that optically active III/V compound semiconductors can be grown on both Ge/Si and InP/Si heterostructures. Current-voltage electrical characterization of the interfaces of these structures indicates that both InP/Si and Ge/Si interfaces have specific resistances lower than 0.1 Ωcm^2 for heavily doped wafer bonded interfaces, enabling back surface power extraction from the finished cell structure.
机译:由InGaAs,InGeAsP,GaAs和Ga0.5In0.5P子电池组成的四结电池设计可以达到1 x AMO效率35.4%。但依赖于非晶格匹配材料的集成。晶圆键合和层转移工艺在制造InP / Si外延模板中显示出希望,该模板可用于在Si支撑衬底上生长底部InGaAs和InGaAsP子电池。随后的晶圆键合以及薄Ge层到下部子电池堆栈上的层转移可以用作GaAs和Ga0.5In0.5P亚晶的外延模板。目前的结果表明,可以在Ge / Si和InP / Si异质结构上生长光学活性的III / V化合物半导体。这些结构的界面的电流-电压电特性表明,对于重掺杂的晶圆键合界面,InP / Si和Ge / Si界面的电阻率均低于0.1Ωcm^ 2,从而可以从完成的电池结构中提取背面功率。

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