Comment on “Effects of focused ion beam milling on the nanomechanical behavior of a molybdenum-alloy single crystal” Appl. Phys. Lett. 91, 111915 (2007)

摘要

While this article provides insight into differences in mechanics between Ga+-irradiated and “pure” surfaces of molybdenum, there are several statements that are either inaccurate or poorly stated. It is clear that when a surface is directly irradiated by orthogonal ion beam (0.07–0.21 mW), a focused ion beam (FIB) damage layer will likely form and affect the strength. However, this finding does not provide adequate foundation for raising the question of FIB-induced hardening in nanopillars, given the vast differences between these experiments and procedure used in pillar fabrication. These issues would cause considerable confusion and result in disservice to mechanical testing community if not clarified.