Solgel route to erbium-doped microlasers and Raman microlasers on-a-chip

摘要

Ultra-high-Q microresonators are fabricated on silicon chips by the solgel technique. Using wafer-based processing and selective reflow, we create toroid-shaped Er-doped microlasers directly from Er-doped solgel layers and Raman microlasers from undoped silica solgel layers.udud