A novel self-heated Bi-Sb thermocouple for far-infrared detection has been developed. The detector is suitable for integration with monolithic antennas and imaging arrays. The device is fabricated in a single photolithography masking step using a photoresist-bridge technique. This bridge technique has also been used to make microbolometers with lower 1/f noise than those made by two conventional masking steps. The thermocouples have a noise equivalent power (NEP) of 7×10^−10 W/(√Hz) and a 3-dB frequency response of 150 kHz.
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机译：已经开发出一种新颖的自热Bi-Sb热电偶用于远红外检测。该探测器适合与单片天线和成像阵列集成。使用光致抗蚀剂桥技术在单个光刻掩模步骤中制造该器件。这种桥接技术也已被用来制造比两个传统的掩膜步骤制造的低/ f噪声的微辐射热计。热电偶的噪声等效功率（NEP）为7×10 ^ -10 W /（√Hz），并且3dB的频率响应为150 kHz。
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