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Diffusion Behaviors and Electrical Properties in the In-Ga-Zn-O Thin Film Deposited by Radio-frequency Reactive Magnetron Sputtering

机译：通过射频反应磁控溅射沉积的Ga-Zn-O薄膜中的扩散行为和电性能

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Seok Ryeol Lee; Jae Ha Choi; Ho Seong Lee;
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Diffusion Behaviors and Electrical Properties in the In-Ga-Zn-O Thin Film Deposited by Radio-frequency Reactive Magnetron Sputtering

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