Micro-arc oxidation (MAO) coating with outstanding adhesion strength to Mg alloys has attracted more and more attention. However, owing to the porous structure, aggressive ions easily invaded the MAO/substrate interface through the through pores, limiting long-term corrosion resistance. Therefore, a dense and biocompatible tantalum oxide (Ta2O5) nanofilm was deposited on MAO coated Mg alloy AZ31 through atomic layer deposition (ALD) technique to seal the micropores and regulate the degradation rate. Surface micrography, chemical compositions and crystallographic structure were characterized using FE-SEM, EDS, XPS and XRD. The corrosion resistance of all samples was evaluated through electrochemical and hydrogen evolution tests. Results revealed that the Ta2O5 film mainly existed in the form of amorphousness. Moreover, uniform deposition of Ta2O5 film and effective sealing of micropores and microcracks in MAO coating were achieved. The current density (icorr) of the composite coating decreased three orders of magnitude than that of the substrate and MAO coating, improving corrosion resistance. Besides, the formation and corrosion resistance mechanisms of the composite coating were proposed. Keywords: Magnesium alloys, Micro-arc oxidation, Atomic layer deposition, Coatings
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