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Analysis of the discontinuities of the micro-finishing process, taking into account the form and characteristics of the micro-chips structure

机译：微观整理过程的不连续性分析，考虑了微芯片结构的形式和特性

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Wojciech Kacalak; Katarzyna Tandecka; Filip Szafraniec; Łukasz Rypina; Thomas G. Mathia;
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Analysis of the discontinuities of the micro-finishing process, taking into account the form and characteristics of the micro-chips structure

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