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Deposition of Amorphous and Crystalline Al doped ZnO Thin Films by RF Magnetron Sputtering and their Comparative Properties

机译：通过RF磁控溅射沉积无定形和结晶Al掺杂的ZnO薄膜及其对比特性

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Pankaj K. Bhujbal; Habib M. Pathan; Nandu B. Chaure;
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1. Influence of deposition temperature on the crystallinity of Al-doped ZnO thin films at glass substrates prepared by RF magnetron sputtering method [J] . Zhiyun Zhang, Chonggao Bao, Wenjing Yao, Superlattices and microstructures . 2011,第6期

机译：沉积温度对射频磁控溅射法制备的玻璃基板上掺铝ZnO薄膜结晶度的影响
2. Investigation of the properties of W-doped ZnO thin films with modulation power deposition by RF magnetron sputtering [J] . Yichuan Chen, Yuehui Hu, Xiaohua Zhang, Journal of materials science . 2017,第7期

机译：射频磁控溅射调制功率沉积钨掺杂ZnO薄膜的性能研究
3. Crystallinity, etchability, electrical and mechanical properties of G.A. doped amorphous indium tin oxide thin films deposited by direct current magnetron sputtering [J] . Hyun-Jun Lee, Pung-Keun Song Thin Solid Films . 2014,第maya30期

机译：G.A.的结晶度，可蚀刻性，电气和机械性能直流磁控溅射沉积掺杂非晶铟锡氧化物薄膜
4. Investigation of the Properties of Al-doped ZnO Thin Films with Sputtering Pressure Deposition by RF Magnetron Sputtering [C] . Weiqiang Shuai, Yuehui Hu, Yichuan Chen, International Conference on Education, Management, Information and Mechanical Engineering . 2017

机译：RF磁控溅射溅射压力沉积抗氮锌薄膜性能研究
5. Manufacturing gallium doped ZNO thin films suitable for use in thin film transistors using unbalanced magnetron sputtering. [D] . Jones, Timothy R. 2013

机译：使用不平衡磁控溅射制造适用于薄膜晶体管的掺镓ZNO薄膜。
6. Processing and Study of Optical and Electrical Properties of (Mg Al) Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering for Photovoltaic Application [O] . Chayma Abed, Susana Fernández, Selma Aouida, 2020

机译：射频磁控溅射制备（MgAl）共掺杂ZnO薄膜的光电性能研究与研究
7. Investigation of the Properties of Al-doped ZnO Thin Films with Sputtering Pressure Deposition by RF Magnetron Sputtering [O] . Weiqiang Shuai, Yuehui Hu, Yichuan Chen, 2017

机译：RF磁控溅射溅射压力沉积抗氮锌薄膜性能研究

Deposition of Amorphous and Crystalline Al doped ZnO Thin Films by RF Magnetron Sputtering and their Comparative Properties

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