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Switchable Transducers in GaN MEMS Resonators: Performance Comparison and Analysis

机译:GaN MEMS谐振器中可切换传感器:性能比较和分析

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摘要

This work presents a comprehensive comparison of switchable electromechanical transducers in an AlN/GaN heterostructure toward the goal of reconfigurable RF building blocks in next-generation ad hoc radios. The transducers’ inherent switching was achieved by depleting a 2D electron gas (2DEG) channel, allowing an RF signal launched by interdigital transducers (IDTs) to effectively excite the symmetric (So) Lamb mode of vibration in the piezoelectric membrane. Different configurations for applying DC bias to the channel for electromechanical actuation in the piezoelectric are discussed. Complete suppression of the mechanical mode was achieved with the transducers in the OFF state. Equivalent circuit models were developed to extract parameters from measurements by fitting in both ON and OFF states. This is the first time that an extensive comparative study of the performance of different switchable transducers in their ON/OFF state is presented along with frequency scaling of the resonant mode. The switchable transducer with Ohmic IDTs and a Schottky control gate showed superior performance among the designs under consideration.
机译:该工作介绍了Aln / GaN异质结构中可切换机电换能器的全面比较,朝向下一代AD Hoc无线电中可重新配置的RF构建块的目标。通过耗尽2D电子气(2DEG)通道来实现换能器的固有切换,允许通过叉指换能器(IDT)发射的RF信号来有效地激发压电膜中的对称(SO)振动的振动模式。讨论了用于将DC偏压施加到压电中的机电致动的通道的不同配置。通过关闭状态的换能器实现了对机械模式的完全抑制。开发了等效电路模型,以通过在on和OFF状态下通过拟合来提取参数。这是第一次提出了对它们开/关状态的不同可切换换能器的性能的广泛比较研究以及谐振模式的频率缩放。具有欧姆IDT的可切换换能器和肖特基控制栅极在考虑的设计中表现出优异的性能。

著录项

  • 作者

    Imtiaz Ahmed; Dana Weinstein;

  • 作者单位
  • 年度 2021
  • 总页数
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类

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