Coupling efficiency control of vertically coupled microring resonator was successfully realized by microactuator, which is suitable for the simultaneous integration of microelectromechanical systems switch and thermoootic tunable filter. The extinction ratio of drop port response of 15.1 dB, through port response of 2.1 dB, and switching time of 60 mu s were demonstrated at the applied voltage of 350 V. The loss of through port response in the OFF-state was reduced to 0.8 dB.
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机译：通过微致动器成功地实现了垂直耦合微管谐振器的耦合效率控制，其适用于微机电系统开关和热毒色调过滤器的同时集成。通过2.1dB的端口响应，通过2.1dB的端口响应和60μs的切换时间在350 V的施加电压下进行消除比率。通过偏离状态下的端口响应的损耗降至0.8 D b。
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