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Application of fluorine-containing gases for cleaning CVD systems in consideration of global environmental problems—2—

机译：含氟气体在考虑全球环境问题 - 2-中施加清洁CVD系统-2-

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Isamu MOURI; Seiji HAYAKAWA;
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年度 1997
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4. Comparison of pecvd chamber cleaning processes (environmental, productivity, and economic considerations) [C] . C. C. Allgood, S. Hsu, M. Mocella Annual Symposium on Environmental Issue with Materials and Processes for the Elctronics and Semiconductor Industries . 2001

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7. Application of fluorine-containing gases for cleaning CVD systems in consideration of global environmental problems—1— [O] . Isamu MOURI, Seiji HAYAKAWA 1997

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Application of fluorine-containing gases for cleaning CVD systems in consideration of global environmental problems—2—

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