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Compositional study of vacuum annealed Al doped ZnO thin films obtained by RF magnetron sputtering

机译：RF磁控溅射获得的真空退火Al掺杂ZnO薄膜的组成研究

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B. P. Shantheyanda; V. O. Todi; K. B. Sundaram; A. Vijayakumar; I. Oladeji;
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年度 2011
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1. H_2/Ar and vacuum annealing effect of ZnO thin films deposited by RF magnetron sputtering system [J] . Kim J., Kim M.-C., Yu J., Current applied physics: the official journal of the Korean Physical Society . 2010,第Suppla3期

机译：射频磁控溅射系统沉积ZnO薄膜的H_2 / Ar和真空退火效应
2. Effect of annealing treatment on structural, electrical, and optical properties of Ga-doped ZnO thin films deposited by RF magnetron sputtering [J] . F. Wu, L. Fang, Y.J. Pan, Thin Solid Films . 2011,第2期

机译：退火处理对射频磁控溅射沉积Ga掺杂ZnO薄膜的结构，电学和光学性质的影响
3. Effects of post-annealing on the structural and nanomechanical properties of Ga-doped ZnO thin films deposited on glass substrate by rf-magnetron sputtering [J] . Szu-Ko Wang, Ting-Chun Lin, Sheng-Rui Jian, Applied Surface Science . 2011,第3期

机译：后退火对射频磁控溅射沉积在玻璃基板上的掺镓ZnO薄膜的结构和纳米力学性能的影响
4. Effect of Stress, Strain and Optical properties in Vacuum and Normal annealed ZnO Thin Films Using RF Magnetron Sputtering [C] . B. Santhosh Kumar, K. Purvaja, N. Harinee, International Conference on Condensed Matter and Applied Physics . 2017

机译：使用RF磁控溅射在真空和正态退火的ZnO薄膜中的应力，应变和光学性质的影响
5. Manufacturing gallium doped ZNO thin films suitable for use in thin film transistors using unbalanced magnetron sputtering. [D] . Jones, Timothy R. 2013

机译：使用不平衡磁控溅射制造适用于薄膜晶体管的掺镓ZNO薄膜。
6. Processing and Study of Optical and Electrical Properties of (Mg Al) Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering for Photovoltaic Application [O] . Chayma Abed, Susana Fernández, Selma Aouida, 2020

机译：射频磁控溅射制备（MgAl）共掺杂ZnO薄膜的光电性能研究与研究
7. Processing and Study of Optical and Electrical Properties of (Mg, Al) Co-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering for Photovoltaic Application [O] . Chayma Abed, Susana Fernández, Selma Aouida, 2020

机译：由RF磁控溅射制备的（Mg，Al）共掺杂ZnO薄膜的光学和电性能的加工和研究光伏应用

Compositional study of vacuum annealed Al doped ZnO thin films obtained by RF magnetron sputtering

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