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Thin films-preparation, structure and properties. Structural and electrical properties of Mo/Al multilayers synthesized by sputtering.

机译：薄膜制备，结构和性质。通过溅射合成的Mo / Al多层的结构和电性能。

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Toshihide IZUMIYA; Eiko SAITO; Ryoichi YAMAMOTO; Masao DOYAMA;
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年度 1987
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Thin films-preparation, structure and properties. Structural and electrical properties of Mo/Al multilayers synthesized by sputtering.

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