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Properties of Ti-Al-Si-N Nano-composite Films Prepared by Reactive Sputtering

机译：反应溅射制备的Ti-Al-Si-N纳米复合膜的性质

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Masateru Nose; Hirofumi Suzuki; Yoshio Okumura; Eiji Honbo; Takehiko Mae; Hiroshi Anada; Kiyoshi Nogi;
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年度 2004
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1. Optical Properties of Au/SiO_2 Nano-Composite Films Prepared by Induction-Coil-Coupled Plasma Sputtering [J] . Bo-Ping Zhang, Hiroshi Masumoto, Yoshihiro Someno Materials transactions . 2003,第2期

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2. The optical properties of Ag-Si nano-composite films prepared by sputtering [J] . Ququan Wang, Baifeng Yang, Decheng Tian, Surface & Coatings Technology . 2000,第1a3期

机译：溅射制备的Ag-Si纳米复合薄膜的光学性质
3. Electrochromic Properties of Reactive Magnetron Sputtered WO3 Thin Films Prepared by Neon as Sputter Gas [J] . Kumar K. Uday, Subrahmanyam A. Journal of nanoscience and nanotechnology . 2020,第6期

机译：反应性磁控溅射的电致变色特性由霓虹溅射WO3薄膜作为溅射气体
4. Influence of oxygen flow rate on structural, optical and electrical properties of copper oxide thin films prepared by reactive magnetron sputtering [C] . Thitinai Gaewdang, Ngamnit Wongcharoen International Conference on Aerospace, Mechanical and Mechatronic Engineering . 2017

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5. Cation Doped Titanum Dioxygen Thin Films Prepared by Reactive Sputtering: Synthesis, Characterization, and Applications for Environmental Catalysis. [D] . DeSario, Paul Anthony. 2011

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6. Surface Properties of Nanostructured Porous ZnO Thin Films Prepared by Direct Current Reactive Magnetron Sputtering [O] . Monika Kwoka, Barbara Lyson-Sypien, Anna Kulis, 2018

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7. The effect of thickness on the properties of Zr-Hf-N thin films prepared by reactive co-magnetron sputtering [O] . J. Prathumsit, G. Gitgeatpong, W. Phae-ngam, 2020

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Properties of Ti-Al-Si-N Nano-composite Films Prepared by Reactive Sputtering

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