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High resolution 3D imaging of integrated circuits by x-ray ptychography

机译：通过X射线PTYCHOGAGE的集成电路高分辨率3D成像

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Michal Odstrcil; Mirko Holler; Jörg Raabe; Manuel Guizar-Sicairos;
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年度 2018
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1. High-Resolution Imaging of Polymer Electrolyte Membrane Fuel Cell Cathode Layers by Soft X-ray Spectro-Ptychography [J] . Wu Juan, Zhu Xiaohui, West Marcia M., The journal of physical chemistry, C. Nanomaterials and interfaces . 2018,第22期

机译：通过软X射线光谱 - PTYCHOMACHOME的聚合物电解质膜燃料电池阴极层的高分辨率成像
2. High-resolution hard x-ray magnetic imaging with dichroic ptychography [J] . Claire Donnelly, Valerio Scagnoli, Manuel Guizar-Sicairos, Physical review. B, Condensed Matter And Materials Physics . 2016,第6期

机译：二向色分型术的高分辨率硬X射线磁成像
3. High-resolution hard x-ray magnetic imaging with dichroic ptychography [J] . Donnelly Claire, Scagnoli Valerio, Guizar-Sicairos Manuel, Physical review, B . 2016,第6期

机译：高分辨硬X射线磁成像与二向色性
4. High-resolution 3D imaging of integrated circuits by X-ray ptychography [C] . Michal Odstrcil, Mirko Holler, Jorg Raabe, SPIE Commercial + Scientific Sensing and Imaging Conference . 2018

机译：X射线刻印术对集成电路进行高分辨率3D成像
5. Photonic Integrated Circuits for Compact High Resolution Imaging and High Capacity Communication Utility [D] . Su, Tiehui. 2017

机译：用于紧凑型高分辨率成像和大容量通信实用程序的光子集成电路
6. Dark-field X-ray ptychography: Towards high-resolution imaging of thick and unstained biological specimens [O] . Akihiro Suzuki, Kei Shimomura, Makoto Hirose, -1

机译：暗场X射线刻印术：致力于对厚而未染色的生物标本进行高分辨率成像
7. Multislice Imaging of Integrated Circuits by X-ray Ptychography [O] . Kei Shimomura, Makoto Hirose, Takaya Higashino, 2018

机译：X射线PTYCHOGAGE的集成电路多层成像
8. Non Destructive 3D X-Ray Imaging of Nano Structures & Composites at Sub- 30 NM Resolution, With a Novel Lab Based X-Ray Microscope; Conference paper [R] . Lau, S. H., Tkachuk, A., Cui, H., 2006

机译：纳米结构和复合材料的非破坏性3D X射线成像，低于30 Nm分辨率，采用新型实验室X射线显微镜;会议文件

High resolution 3D imaging of integrated circuits by x-ray ptychography

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