NbTiN superconducting nanowire detectors for visible and telecom wavelengths single photon counting on Si3N4 photonic circuits

摘要

We demonstrate niobium titanium nitride superconducting nanowires patternedon stoichiometric silicon nitride waveguides for detecting visible and infraredphotons. The use of silicon nitride on insulator on silicon substrates allowsus to simultaneously realize photonic circuits for visible and infrared lightand integrate them with nanowire detectors directly on-chip. By implementing atraveling wave detector geometry in this material platform, we achieveefficient single photon detection for both wavelength regimes. Our detectorsare an ideal match for integrated quantum optics as they provide crucialfunctionality on a wideband transparent waveguide material.