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A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high-temperature gas microreactors

机译：一种新的高温气体微反应器深流动通道催化剂薄膜沉积的新技术

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R.M. Tiggelaar; J.W. Berenschot; R.E. Oosterbroek; P. van Male; M.H.J.M. de Croon; J.C. Schouten; A. van den Berg; M.C. Elwenspoek;
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A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high-temperature gas microreactors

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