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Electrical characteristics of a low-temperature, atmospheric-pressure helium plasma jet

机译:低温,大气压氦等离子射流的电气特性

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摘要

In this work, we precisely measure the electrical properties of a low-temperature atmospheric-pressure helium plasma jet, such as the rf current and voltage, and analyze in detail its characteristics. The results show that the instantaneous plasma current and voltage are nearly in phase, which means that the plasma is purely resistive. The instantaneous plasma power is always active, and the average output power is the same as the plasma power. Thus, almost all the active energy flows instantaneously into the plasma. The large fraction of active energy that flows into the plasma is used for heating neutral particles in collisions. The number and polarity of the charged particles at the inner surface of the dielectric tube in the plasma electrode were estimated by integrating the plasma current. When the plasma discharge is maintained between the plasma electrode and target plate, the polarity is always negative with respect to the target plate. When the plasma is exposed to the ambient air without the target plate, the polarity is bipolar. We attribute this difference to the loss mechanism of plasma.
机译:在这项工作中,我们精确地测量低温大气压氦等离子体射流的电性能,例如RF电流和电压,并详细分析其特性。结果表明,瞬时等离子体电流和电压几乎相位,这意味着等离子体纯电阻。瞬时等离子体功率始终有效,平均输出功率与等离子电源相同。因此,几乎所有活性能量瞬间流入等离子体中。流入等离子体的大部分活性能量用于在碰撞中加热中性颗粒。通过整合等离子体电流估计等离子体电极中电介质管内表面的带电粒子的数量和极性。当等离子体放电在等离子体电极和靶板之间保持时,极性相对于目标板总是负。当等离子体暴露于没有靶板的环境空气时,极性是双极的。我们将这种差异归因于等离子体的损失机制。

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