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Development of Multi-Step Procedure for Epitaxial Growth of Crystalline Silicon on Rare-Earth-Metal Oxide for SOI-Applications

机译：SOI应用稀土金属氧化物外结晶硅外延生长的多步骤的研制

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R. Dargis; A. Fissel; E. Bugiel; D. Schwendt; T. Wietler; A. Laha; H. J. Osten;
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年度 2009
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1. Epitaxial growth and thermal stability of silicon layers on crystalline gadolinium oxide [J] . Dargis R., Fissel A., Schwendt D., Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2010,第4期

机译：结晶氧化oxide上硅层的外延生长和热稳定性
2. Rare-earth-metal oxide buffer for epitaxial growth of single crystal GeSi and Ge on Si(111) [J] . Rytis Dargis, Erdem Arkun, Andrew Clark, Journal of Vacuum Science & Technology . 2012,第2期

机译：用于在Si（111）上外延生长单晶GeSi和Ge的稀土金属氧化物缓冲液
3. Epitaxial Electrodeposition of a Crystalline Metal Oxide onto Single-Crystalline Silicon [J] . Jay A. Switzer, Run Liu, Eric W. Bohannan, The journal of physical chemistry, B. Condensed matter, materials, surfaces, interfaces & biophysical . 2002,第48期

机译：晶体金属氧化物在单晶硅上的外延电沉积
4. Study of the Structural and Thermal Properties of Single Crystalline Epitaxial Rare-Earth-Metal Oxide Layers Grown on Si(111) [C] . R. Dargis, D. Williams, R. Smith, Physics and technology of high-k materials 9 . 2011

机译：Si（111）上生长的单晶外延稀土金属氧化物层的结构和热性能的研究
5. Epitaxial Growth of Silicon on Poly-Crystalline Si Seed layer at Low Temperature by Using Hot Wire Chemical Vapor Deposition. [D] . Aldawsari, Manal Abdullah. 2015

机译：通过热线化学气相沉积在低温下在多晶硅籽晶层上外延生长硅。
6. Epitaxial growth of highly-crystalline spinel ferrite thin films on perovskite substrates for all-oxide devices [O] . Jarrett A. Moyer, Ran Gao, Peter Schiffer, -1

机译：在全氧化物器件的钙钛矿衬底上外延生长高结晶尖晶石铁氧体薄膜
7. The importance of annealing and stages coverage on the epitaxial growth of complex oxides on silicon by pulsed laser deposition [O] . Daniel Diaz-Fernandez, Matjaž Spreitzer, Tjaša Parkelj, 2017

机译：退火和阶段覆盖对脉冲激光沉积硅复合氧化物外延生长的重要性
8. Epitaxial Reactor Development for Growth of Silicon-on-Insulator Devices [R] . Dumin, D. J. 1987

机译：外延反应器开发用于绝缘体上硅器件的生长

Development of Multi-Step Procedure for Epitaxial Growth of Crystalline Silicon on Rare-Earth-Metal Oxide for SOI-Applications

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