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Study on the Stability of the Electrical Connection of High-Temperature Pressure Sensor Based on the Piezoresistive Effect of P-Type SiC

机译：基于P型SiC压阻效应的高温压力传感器电气连接稳定性研究

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Yongwei Li; Ting Liang; Cheng Lei; Qiang Li; Zhiqiang Li; Abdul Ghaffar; Jijun Xiong;
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1. Thermoresistive properties of p-type 3C-SiC nanoscale thin films for high-temperature MEMS thermal-based sensors [J] . Toan Dinh, Hoang-Phuong Phan, Kozeki Takahiro, RSC Advances . 2015,第128期

机译：用于高温MEMS热基传感器的P型3C-SiC纳米薄膜的热敏性能
2. Long-term stability of nickel-based ohmic contacts with n-type and p-type 4H-SiC in a high-temperature environment [J] . Masunaga Masahiro, Crescitelli Viviana, Funaki Tsuyoshi Japanese journal of applied physics . 2020,第10期

机译：高温环境中N型和P型4H-SiC基于镍的欧姆触点的长期稳定性
3. High-temperature piezoresistive pressure sensor based on implantation of oxygen into silicon wafer [J] . Li X., Liu Q., Pang S., Sensors and Actuators, A. Physical . 2012,第Null期

机译：基于将氧气注入到硅片中的高温压阻式压力传感器
4. Metal contacts to n- and p-type 6H-SiC: electrical characteristics and high-temperature stability [C] . International conference on SiC and related materials . 1994

机译：金属触点和P型6H-SIC：电气特性和高温稳定性
5. A novel hydrogel based piezoresistive pressure sensor platform for chemical sensing. [D] . Orthner, Michael P. 2010

机译：一种基于水凝胶的新型压阻式压力传感器平台，用于化学传感。
6. Study on the Stability of the Electrical Connection of High-Temperature Pressure Sensor Based on the Piezoresistive Effect of P-Type SiC [O] . Yongwei Li, Ting Liang, Cheng Lei, 2021

机译：基于P型SiC压阻效应的高温压力传感器电气连接稳定性研究
7. Thermoresistive properties of p-type 3C–SiC nanoscale thin films for high-temperature MEMS thermal-based sensors [O] . Toan Dinh, Hoang-Phuong Phan, Takahiro Kozeki, 2015

机译：用于高温MEMS热基传感器的P型3C-SiC纳米薄膜的热敏性能

Study on the Stability of the Electrical Connection of High-Temperature Pressure Sensor Based on the Piezoresistive Effect of P-Type SiC

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