首页> 外文OA文献 >Substrate Temperature Dependent Properties of Sputtered AlN:Er Thin Film for In-Situ Luminescence Sensing of Al/AlN Multilayer Coating Health

【2h】

Substrate Temperature Dependent Properties of Sputtered AlN:Er Thin Film for In-Situ Luminescence Sensing of Al/AlN Multilayer Coating Health

机译：溅射ALN的衬底温度依赖性：ER薄膜用于Al / Aln多层涂层健康的原位发光感测

代理获取

本网站仅为用户提供外文OA文献查询和代理获取服务，本网站没有原文。下单后我们将采用程序或人工为您竭诚获取高质量的原文，但由于OA文献来源多样且变更频繁，仍可能出现获取不到、文献不完整或与标题不符等情况，如果获取不到我们将提供退款服务。请知悉。

页面导航

著录项
引文网络
相似文献
相关主题

著录项

作者
Liping Fang; Yidong Jiang; Shengfa Zhu; Jingjing Ding; Dongxu Zhang; Anyi Yin; Piheng Chen;
展开▼
作者单位

展开▼
年度 2018
总页数
原文格式 PDF
正文语种
中图分类

相似文献

外文文献
中文文献
专利

1. On the potential of Er-doped AlN film as luminescence sensing layer for multilayer Al/AlN coating health monitoring [J] . Liping Fang, Anyi Yin, Shengfa Zhu, Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics . 2017,第期

机译：关于多层Al / AlN涂层健康监测的ER掺杂ALN薄膜的电位为发光传感层
2. Influence of Substrate Temperature on Structural Properties and Deposition Rate of AlN Thin Film Deposited by Reactive Magnetron Sputtering [J] . HAO JIN, BIN FENG, SHURONG DONG, Journal of Electronic Materials . 2012,第7期

机译：衬底温度对反应磁控溅射沉积AlN薄膜的结构性能和沉积速率的影响
3. Influence of Substrate Temperature on Structural Properties and Deposition Rate of AlN Thin Film Deposited by Reactive Magnetron Sputtering [J] . Hao Jin, Bin Feng, Shurong Dong, Journal of Electronic Materials . 2012,第7期

机译：衬底温度对反应磁控溅射沉积AlN薄膜的结构性能和沉积速率的影响
4. Substrate Temperature and Bias Voltage Dependent Properties of Sputtered AlN Thin Films for BAW Applications [C] . M. Schneider, J. Weiβenbach, U. Schmid IEEE International Conference on Nanotechnology . 2018

机译：用于BAW应用的溅射AlN薄膜的衬底温度和偏置电压相关特性
5. Erbium alloyed AlN thin films: Structural, piezoelectric and magnetic properties. [D] . Narang, Vishal. 2015

机译：N合金化的AlN薄膜：结构，压电和磁性。
6. Substrate Temperature Dependent Properties of Sputtered AlN:Er Thin Film for In-Situ Luminescence Sensing of Al/AlN Multilayer Coating Health [O] . Liping Fang, Yidong Jiang, Shengfa Zhu, 2018

机译：溅射AlN：Er薄膜的基底温度相关特性用于Al / AlN多层涂层健康的原位发光传感
7. Structural and optical properties of Er implanted AlN thin films: green and infrared photoluminescence at room temperature [O] . Soares M.J., Leitão J.P., Silva M.I.N. da, 2011

机译：注入Er的AlN薄膜的结构和光学性质：室温下的绿色和红外光致发光
8. Effect of Substrate Composition on the Piezoelectric Response of Reactively Sputtered AlN Thin Films;Thin Solid Films [R] . Clem, P. G. , Dimos, D. B. , Gonzales, D. M. , 1999

机译：基体组成对反应溅射alN薄膜压电响应的影响;薄固体薄膜

Substrate Temperature Dependent Properties of Sputtered AlN:Er Thin Film for In-Situ Luminescence Sensing of Al/AlN Multilayer Coating Health

著录项

引文网络

相似文献

相关主题

期刊订阅