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Ion Implantation as a Tool for Controlled Modification of Photoelectrical Properties of Silicon

机译：离子植入作为控制硅光电性能的控制改变工具

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Nina Khuchua; Marina Tigishvili; Nugzar Dolidze; Zurab Jibuti; Revaz Melkadze; Roland Diehl;
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Ion Implantation as a Tool for Controlled Modification of Photoelectrical Properties of Silicon

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