Effect of Microbubbles on Ozonized Water for Photoresist Removal

机译：微泡对光致抗蚀剂去除水的影响

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Masayoshi Takahashi; Hideo Horibe; Kouhei Matsuura; Katsumi Tatera;
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1. Effect of Microbubbles on Ozonized Water for Photoresist Removal [J] . Takahashi Masayoshi, Horibe Hideo, Matsuura Kouhei, Journal of Photopolymer Science and Technology . 2015,第2期

机译：微泡对臭氧水去除光致抗蚀剂的影响
2. Effect of Microbubbles on Ozonized Water for Photoresist Removal [J] . Masayoshi Takahashi, Hideo Horibe, Kouhei Matsuura, Journal of Photopolymer Science and Technology . 2015,第2期

机译：微泡对臭氧水去除光致抗蚀剂的影响
3. Effect of Microbubbles on Ozonized Water for Photoresist Removal [J] . Hiroaki Ishikawa, Toshiyuki Asano, Masayoshi Takahashi The journal of physical chemistry, C. Nanomaterials and interfaces . 2012,第23期

机译：微泡对臭氧水去除光致抗蚀剂的影响
4. Effect of Radical Scavenger and UV Irradiation on Removal of Photoresist and BARC using Water/Ozone in Cu/Low-k Interconnect [C] . Q. T. Le, M. Lux, E. Kesters, Cleaning and surface conditioning technology in semiconductor device manufacturing 11 . 2009

机译：Cu / Low-k互连中自由基清除剂和紫外线辐射对水/臭氧去除光致抗蚀剂和BARC的影响
5. Assessing Biofiltration without Ozonation for Removal of Trihalomethane Precursors in Drinking Water at the Beaver Water District Drinking Water Treatment Plant [D] . Ajaz, Sana 2018

机译：在海狸水区饮用水处理厂评估不含臭氧的生物过滤以去除饮用水中的三卤甲烷前体
6. Ozone-Based Advanced Oxidation Processes for Primidone Removal in Water using Simulated Solar Radiation and TiO2 or WO3 as Photocatalyst [O] . Manuel A. Figueredo, Eva M. Rodríguez, Manuel Checa, 2019

机译：使用模拟的太阳辐射和TiO2或WO3作为光催化剂的基于臭氧的高级氧化工艺去除水中的吡啶甲酮
7. Effects of Oxygen Microbubbles on Photoresist Layers under Hot Water Conditions [O] . Masayoshi Takahashi, Yasuyuki Shirai, Akinobu Teramoto, 2016

机译：氧微泡对热水条件下光致抗蚀剂层的影响
8. Comparison of chilled DI water/ozone and CO(sub 2)-based supercritical fluids as replacements for photoresist-stripping solvents [R] . Rubin, J. B. , Davenhall, L. B. , Barton, J. , 1998

机译：冷却DI水/臭氧和CO（sub 2）基超临界流体作为光刻胶剥离溶剂替代品的比较

Effect of Microbubbles on Ozonized Water for Photoresist Removal

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