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Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films

机译：溅射铝氮化铝薄膜结构，电子，光学和力学性能的测量和AB初始调查

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A. M. Alsaad; Qais M. Al-Bataineh; I. A. Qattan; Ahmad A. Ahmad; A. Ababneh; Zaid Albataineh; Ihsan A. Aljarrah; Ahmad Telfah;
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1. Ab initio investigations of structural, electronic and mechanical properties of aluminum nitride at standard and elevated pressures [J] . Zagorac Jelena, Zagorac Dejan, Jovanovic Dusica, The journal of physics and chemistry of solids . 2018,第期

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2. Structural and optical properties of c-axis oriented aluminum nitride thin films prepared at low temperature by reactive radio-frequency magnetron sputtering [J] . Aurelian C. Galca, George E. Stan, Liliana M. Trinca, Thin Solid Films . 2012,第期

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3. Study of optical and structural properties of sputtered aluminum nitride films with controlled oxygen content to fabricate Distributed Bragg Reflectors for ultraviolet A [J] . Anjum Faiza, Fryauf David M., Gold Jeff, Optical Materials . 2019,第Deca期

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4. Nitrogen Concentrations on Structural and Optical Properties of Aluminum Nitride Films Deposited by Reactive RF-Magnetron Sputtering [C] . Amorn Thedsakhulwong, Kitsakorn Locharoenrat, Warawoot Thowladda International Conference on Materials Engineering for Advanced Technologies . 2013

机译：反应性RF-磁控溅射沉积铝氮化铝膜结构和光学性质的氮浓度
5. Investigations of the gallium nitride, aluminum nitride and indium nitride semiconductors: Structural, optical, electronic and interfacial properties. [D] . Strite, Samuel Clagett, III. 1993

机译：氮化镓，氮化铝和氮化铟半导体的研究：结构，光学，电子和界面特性。
6. Investigations on Structural Optical and X-Radiation Responsive Properties of a-Se Thin Films Fabricated by Thermal Evaporation Method at Low Vacuum Degree [O] . Jitao Li, Xinghua Zhu, Dingyu Yang, 2018

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7. Structural and Optical Properties of Aluminum Nitride Thin Films Deposited by Pulsed DC Magnetron Sputtering [O] . R. K. Choudhary, P. Mishra, A. Biswas, 2013

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Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films

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