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Design and Experiment of a Novel High-Impact MEMS Ceramic Sandwich Accelerometer for Multi-Layer Target Penetration

机译：一种新型高冲击MEMS陶瓷三明治加速度计的设计与实验，用于多层目标渗透

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Min Cui; Yong Huang; Jian Li; Ming Meng;
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年度 2020
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1. Design, fabrication and experiment of a MEMS piezoresistive high-g accelerometer [J] . Yulong Zhao, Xiaobo Li, Jing Liang, Journal of Mechanical Science and Technology . 2013,第3期

机译：MEMS压阻高g加速度计的设计，制造和实验
2. Effect of excitation voltage on bias temperature coefficient of MEMS sandwich accelerometer [J] . Dong Xianshan, Huang Qinwen, Zhu Junhua, International Journal of Modern Physics, B. Condensed Matter Physics, Statistical Physics, Applied Physics . 2019,第12期

机译：激励电压对MEMS夹层加速度计偏置温度系数的影响
3. A MEMS sandwich differential capacitive silicon-on-insulator accelerometer [J] . Yangxi Zhang, Gang Yang, Chengchen Gao, Microsystem technologies . 2013,第8期

机译：MEMS夹层差分电容绝缘体上硅加速度计
4. Numerical Study on Penetration Process of Multi-layer Ceramic Target by Shaped Charge Jets [C] . Makoto TANOUE, Hiroatsu FUKUDA International Conference on Mechanical Engineering and Mechanics . 2007

机译：成形射流侵彻多层陶瓷靶的数值研究
5. Numerical simulation and experiments of fatigue crack growth in multi-layer structures of MEMS and microelectronic devices. [D] . Wang, Bo. 2007

机译：MEMS和微电子器件多层结构中疲劳裂纹扩展的数值模拟和实验。
6. Simulation-Based Design and Optimization of Accelerometers Subject to High-Temperature and High-Impact Loads [O] . Ji Li, Yaling Tian, Junjie Dan, 2019

机译：高温高冲击载荷下基于仿真的加速度计设计与优化
7. Multi-Physics Simulation Platform and Multi-Layer Metal Technology for CMOS-MEMS Accelerometer with Gold Proof Mass [O] . Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, 2019

机译：CMOS-MEMS加速度计的多物理仿真平台和多层金属技术，金色防尘仪
8. Normal Depth of Penetration Experiments in Ceramic/Metal Targets Simulated by Computer. [R] . Dehn, J. 1994

机译：计算机模拟陶瓷/金属靶标穿透实验的正常深度。

Design and Experiment of a Novel High-Impact MEMS Ceramic Sandwich Accelerometer for Multi-Layer Target Penetration

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